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说明
Measurement SEM (Scanning Electron Microscope) - Workstation (UNIX / B180L) - Mouse - EBIS 100 - HV Controller - Gun Cable - TMP 1 & 2 Controllers - X/Y Stage Driver Unit - Deflection Power Supply - MHV B/D Assy - POST1 Power Supply - Loader Motor Assy - ST Sensor PCB - Rotational Arm Unit - Wafer Holder - Robot Unit - Aligner Unit - Robot Controller Confirmed Issues / Faulty Parts: - ECPU 263 Board - EO-CONT - EBIS 100 - Evac & Stage Controller Units - AV1 Gate Valve Assy - Solenoid Valve Unit配置
无配置OEM 型号描述
The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.文件
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HITACHI
S-9220
类别
CD-SEM
上次验证： 4 天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
129576
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Measurement SEM (Scanning Electron Microscope) - Workstation (UNIX / B180L) - Mouse - EBIS 100 - HV Controller - Gun Cable - TMP 1 & 2 Controllers - X/Y Stage Driver Unit - Deflection Power Supply - MHV B/D Assy - POST1 Power Supply - Loader Motor Assy - ST Sensor PCB - Rotational Arm Unit - Wafer Holder - Robot Unit - Aligner Unit - Robot Controller Confirmed Issues / Faulty Parts: - ECPU 263 Board - EO-CONT - EBIS 100 - Evac & Stage Controller Units - AV1 Gate Valve Assy - Solenoid Valve Unit配置
无配置OEM 型号描述
The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.文件
无文件