
说明
Asset Description F02417MET007000 Software Version NA CIM GEM Process CD MEASUREMENT Excluded Items List (Pumps, Chillers & Abatement are all excluded配置
System Type Description Quantity Main System Main tool 1 Options System Optic system Others Factory Interface SMIF 2 Handler System Robot system 1OEM 型号描述
The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.文件
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S-9220
类别
CD-SEM
上次验证: 14 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
137169
晶圆尺寸:
8"/200mm
年份:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available