说明

Asset Description NA Software Version NA CIM GEM Process CD measurement Excluded Items List (Pumps, Chillers & Abatement are all excluded)

配置

System Type Description Quantity Handler System Wafer handler unit 1 Factory Interface SMIF 2 Others NA Main System Main unit 1 Options System NA

OEM 型号描述

The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.