说明
Particle Counter配置
- Wafer holder / configure : 4,6,8 inch - Chuck size : 3.7inch - S/W version : PC - Windows XP Candela Wafer Version - 6.8 Build 6 Wafer Handler Version - 230 - Laser Spec : Optical Head Assembly - Wavelength 405nm / Maximum power output 25mW Wafer Surface Detector - - Wavelength 655nm / Maximum power output 10mW Cassette Mapping Sensor - - Wavelength 670nm / Maximum power output 5mWOEM 型号描述
The Candela CS20 system measures surface reflectivity and topography for automatic defect detection and classification. It uses scatterometry, ellipsometry, reflectometry, and topographical analysis to inspect wafer surfaces for defects and film thickness uniformity. It is designed for inspection of transparent materials such as sapphire and GaN and can detect a wide variety of defects. It is suitable for use in the production of High Brightness Light Emitting Diodes (HBLEDs), High-Power RF Devices, and Coated Glass (CMOS imagers, LCoS chips, etc.).文件
类别
Defect Inspection
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
131288
晶圆尺寸：
4"/100mm, 6"/150mm, 8"/200mm
年份：
2011
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
CANDELA CS20
类别
Defect Inspection
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
131288
晶圆尺寸：
4"/100mm, 6"/150mm, 8"/200mm
年份：
2011
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available