说明
KLA-Tencor Candela CS10V *. Fully refurbished. Installed in Clean-room. Possible demo anytime.配置
Working Illumination Source : 25 mW laser, 405 nm wavelength Operator Interface : Trackball and keyboard standard Substrate Thickness : 350 μm ~ 1,100 μm Substrate Material : Any clear or opaque polished surface [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) Other Defects and Applications : Particles, scratches, stains, pits, and bumps. Sensitivity: Minimum detectable size for automatic defect classification: - Scratches: 100 μm long, 0.1 μm wide, 50 Å; deep. - Pits: 20 μm diameter, 50 Å; deep - Stains: 20 μm diameter, 10 Å; thick [ Application ] - Opaque substrates - EPI Layers - Transparent film coatings (SiC, GaN, Sapphire)OEM 型号描述
The Candela CS10 Optical Surface Analyzer is a compact device that offers exceptional sensitivity to particles and scratches on 2"-12" wafers using dual-laser Optical X-Beam technology. It simultaneously measures phase shift, scattered light, reflected light, and topography to detect and classify wafer surface defects. It is well-suited for laboratory and low volume production applications, and is easy to learn and operate.文件
无文件
KLA
CANDELA CS10
已验证
类别
Defect Inspection
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
65978
晶圆尺寸：
4"/100mm
年份：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
CANDELA CS10
已验证
类别
Defect Inspection
上次验证： 24 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
65978
晶圆尺寸：
4"/100mm
年份：
2009
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
KLA-Tencor Candela CS10V *. Fully refurbished. Installed in Clean-room. Possible demo anytime.配置
Working Illumination Source : 25 mW laser, 405 nm wavelength Operator Interface : Trackball and keyboard standard Substrate Thickness : 350 μm ~ 1,100 μm Substrate Material : Any clear or opaque polished surface [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) Other Defects and Applications : Particles, scratches, stains, pits, and bumps. Sensitivity: Minimum detectable size for automatic defect classification: - Scratches: 100 μm long, 0.1 μm wide, 50 Å; deep. - Pits: 20 μm diameter, 50 Å; deep - Stains: 20 μm diameter, 10 Å; thick [ Application ] - Opaque substrates - EPI Layers - Transparent film coatings (SiC, GaN, Sapphire)OEM 型号描述
The Candela CS10 Optical Surface Analyzer is a compact device that offers exceptional sensitivity to particles and scratches on 2"-12" wafers using dual-laser Optical X-Beam technology. It simultaneously measures phase shift, scattered light, reflected light, and topography to detect and classify wafer surface defects. It is well-suited for laboratory and low volume production applications, and is easy to learn and operate.文件
无文件