说明
ETCH配置
3CHOEM 型号描述
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.文件
无文件
TEL / TOKYO ELECTRON
TRIAS SPA
已验证
类别
Deposition
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
75752
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
TRIAS SPA
类别
Deposition
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
75752
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
ETCH配置
3CHOEM 型号描述
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.文件
无文件