跳至主要内容
Moov logo

Moov Icon
TEL / TOKYO ELECTRON TRIAS SPA
    说明
    CVD
    配置
    CVD
    OEM 型号描述
    The TEL (Tokyo Electron) Trias SPA is a single-wafer plasma processing system designed for semiconductor manufacturing. It utilizes Tokyo Electron's Slot Plane Antenna (SPA) technology to generate high-density, low-electron-temperature plasma, enabling low-damage, low-temperature plasma treatments. This system is particularly suited for critical front-end-of-line (FEOL) applications, including gate nitridation, gate recovery oxidation, and shallow trench isolation (STI) liner oxidation.
    文件

    无文件

    类别
    Deposition

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    21423


    晶圆尺寸:

    12"/300mm


    年份:

    2010


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    TEL / TOKYO ELECTRON

    TRIAS SPA

    verified-listing-icon
    已验证
    类别
    Deposition
    上次验证: 60 多天前
    listing-photo-tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc/7gDFfVN3jllHrM2u_eVgJzz9ncML2y7h0mw-oMrBYHc_20190315_101517_f
    listing-photo-tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc/sH5q4GI2u1CM6r3j_d9-hRypAAOc_AXsVyrdEgY61tk_20190315_101517_f
    listing-photo-tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc/-eXJeN36YgP2-UKP2_f9hhW0uO79o1oUPeniTgWkMoA_20190315_101517_f
    listing-photo-tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc/MXTP_xusbXkfxzFqWP_eeMigSNabYOe4uWOdvWlpcgU_20190315_101517_f
    listing-photo-tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc/elUsTXWcsi4PYlNFYZOWF4OyH0VpBQ3bmP5TWZNloIY_20190315_101517_f
    listing-photo-tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc/FUN7hQjqftshqBY3bXkZn-CTLjUt-4CcTa-XqiyP-j0_20190315_101517_f
    listing-photo-tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/tiOGQrCDTmLKj5fTzBI9vy6OBaajltX_l0xssg-naBc/omCDA_bVecewq9ymQ7MSafH0vc4nwlGq6pdgwYETn_Y_20190315_101517_f
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    21423


    晶圆尺寸:

    12"/300mm


    年份:

    2010


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    CVD
    配置
    CVD
    OEM 型号描述
    The TEL (Tokyo Electron) Trias SPA is a single-wafer plasma processing system designed for semiconductor manufacturing. It utilizes Tokyo Electron's Slot Plane Antenna (SPA) technology to generate high-density, low-electron-temperature plasma, enabling low-damage, low-temperature plasma treatments. This system is particularly suited for critical front-end-of-line (FEOL) applications, including gate nitridation, gate recovery oxidation, and shallow trench isolation (STI) liner oxidation.
    文件

    无文件