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TEL / TOKYO ELECTRON TRIAS SPA
    说明
    CVD
    配置
    CVD
    OEM 型号描述
    The TEL (Tokyo Electron) Trias SPA is a single-wafer plasma processing system designed for semiconductor manufacturing. It utilizes Tokyo Electron's Slot Plane Antenna (SPA) technology to generate high-density, low-electron-temperature plasma, enabling low-damage, low-temperature plasma treatments. This system is particularly suited for critical front-end-of-line (FEOL) applications, including gate nitridation, gate recovery oxidation, and shallow trench isolation (STI) liner oxidation.
    文件

    无文件

    类别
    Deposition

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    15010


    晶圆尺寸:

    12"/300mm


    年份:

    2010


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    TEL / TOKYO ELECTRON

    TRIAS SPA

    verified-listing-icon
    已验证
    类别
    Deposition
    上次验证: 60 多天前
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/afhoe0OwCxCfjT0AUgGZ_pPDt5LUmKDLPwLPp8kFMGs_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/fyBcvJVPULq9ttrDDDl6bukahAuxEjmh-oIphTSA0W0_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/kO2esEPnwy5roAo2v8YRcQwd8hNGYfn0tG8KPMBNwcI_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/vBYFig_yszHwPTLQjsQ0hkTOg0u9lT43ZrMFeVCW_4E_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/-wpqwyYFMgCvK91C0VWCLtzzOU4iIVje_E5u8KmKlY0_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/BT-YXK9PayWrw4E-cMMW06ejRn_g2tbXkbZEEGn_JQ0_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/wIMl_WfBfOeWIW-m-dugvKrECl_8hgkjtkfCKw8Sz7c_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/VoxT6VG-u9SZp5YqBukxTDgh9Z1SYoIRe9UT80w4gUA_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/_i0WNVna85FkT04-wFJ5J2_DUX-YQlbft-D4-Pi8RQs_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/8f9jIs8PrmRrYtUZjIatxfRxg_sU9FlkcLgZbjGlDfI_20190315_101510_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/QwjDNtHYpmi2zTMQnB3zWmEFdbbQGZiPmkAydcr74Yw_20190315_101514_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/EMEOd9zc4Ma9r-R27XSopFyT_sT_3LnVd22q5I9EPrc_20190315_101514_f
    listing-photo-BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/OXrcQ5ToRrmvHW-tOifNY3DOLveaHNvaMGsW12XA0ww/BvLTQ_PJ9HW6AyDsRrU4tkUEm5dd8JY7BQ1kuNPTmtA/WJzQBDeU013JGrvAeh0kOElmIMpQ39TWR6A6AiLdgv0_20190315_101514_f
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    15010


    晶圆尺寸:

    12"/300mm


    年份:

    2010


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    CVD
    配置
    CVD
    OEM 型号描述
    The TEL (Tokyo Electron) Trias SPA is a single-wafer plasma processing system designed for semiconductor manufacturing. It utilizes Tokyo Electron's Slot Plane Antenna (SPA) technology to generate high-density, low-electron-temperature plasma, enabling low-damage, low-temperature plasma treatments. This system is particularly suited for critical front-end-of-line (FEOL) applications, including gate nitridation, gate recovery oxidation, and shallow trench isolation (STI) liner oxidation.
    文件

    无文件