
说明
pump 2配置
Process Gas:CDA/N2/ArOEM 型号描述
The SOPHI-200 is a compact ion implanter designed by ULVAC using their latest advanced technology. It is capable of running substrate sizes up to 200mm in diameter and comes in two energy ranges: up to 200KeV or up to 260KeV. This system is a powerful tool for ion implantation and is suitable for a wide range of applications.文件
无文件
类似上架物品
查看全部ULVAC
SOPHI-200
类别
Medium Current
上次验证: 11 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
130300
晶圆尺寸:
6"/150mm
年份:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
pump 2配置
Process Gas:CDA/N2/ArOEM 型号描述
The SOPHI-200 is a compact ion implanter designed by ULVAC using their latest advanced technology. It is capable of running substrate sizes up to 200mm in diameter and comes in two energy ranges: up to 200KeV or up to 260KeV. This system is a powerful tool for ion implantation and is suitable for a wide range of applications.文件
无文件