说明
KLA-Tencor P-10 Surface Profiler Manufacturer: KLA-Tencor Model: P-10 Equipment Type: Surface Profiler Measurement Method: Contact Stylus Maximum Wafer Size: 8 inch (200 mm) Measurement Capabilities: Step Height, Surface Roughness, Waviness Vertical Measurement Range: Up to approximately 300 µm (configuration dependent) Vertical Resolution: 0.5 / 2 / 10 Å (depending on configuration) Scan Length: 60 mm standard; up to 150 mm on some configurations Scan Speed: 1 µm/s to 25 mm/s Stylus Tip: Diamond, 2 µm radius (configuration dependent) Stage: Motorized XY Stage The KLA-Tencor P-10 is a contact stylus surface profiler designed for measuring step height, surface roughness, and waviness on semiconductor wafers and other materials. Specifications depend on the installed measurement head and configuration.配置
无配置OEM 型号描述
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.文件
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KLA
P-10
类别
Profiler
上次验证： 8 天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
153632
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
KLA-Tencor P-10 Surface Profiler Manufacturer: KLA-Tencor Model: P-10 Equipment Type: Surface Profiler Measurement Method: Contact Stylus Maximum Wafer Size: 8 inch (200 mm) Measurement Capabilities: Step Height, Surface Roughness, Waviness Vertical Measurement Range: Up to approximately 300 µm (configuration dependent) Vertical Resolution: 0.5 / 2 / 10 Å (depending on configuration) Scan Length: 60 mm standard; up to 150 mm on some configurations Scan Speed: 1 µm/s to 25 mm/s Stylus Tip: Diamond, 2 µm radius (configuration dependent) Stage: Motorized XY Stage The KLA-Tencor P-10 is a contact stylus surface profiler designed for measuring step height, surface roughness, and waviness on semiconductor wafers and other materials. Specifications depend on the installed measurement head and configuration.配置
无配置OEM 型号描述
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.文件
无文件