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说明
- Installed in Clean-room.配置
Tencor P-10 Step Height Measurement System - Standard Head with L(yellow) type stylus. - Measurement Range: 13㎛,300㎛. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - Intel Pentium 233Mhz Ram:32MB , HDD: 2GB - Utility: Vacuum. - Power: 115V/50HZ, 4A.OEM 型号描述
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.文件
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KLA
P-10
类别
Profiler
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
65991
晶圆尺寸：
8"/200mm
年份：
1995
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说明
- Installed in Clean-room.配置
Tencor P-10 Step Height Measurement System - Standard Head with L(yellow) type stylus. - Measurement Range: 13㎛,300㎛. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - Intel Pentium 233Mhz Ram:32MB , HDD: 2GB - Utility: Vacuum. - Power: 115V/50HZ, 4A.OEM 型号描述
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.文件
无文件