说明
Clusterline 200E - PVD配置
GEM/SECS Interface Yes(SECS) SECS II Interface Yes Standard Network Communication Capability No Machine Electricity Transformer Current 200A Transformer Voltage 460V Main Power 400V Key Common Options Included? Clean Room Manuals Yes Standard Manuals Yes Calibration Standards No Transport module Configuration Front Monitor Yes Rear Monitor Yes TM Robot Broos MagnaTran LEAP Load Lock Vacuum Turbo Pump TU2 Blank TU3 aligner TU6 Cooler Process Module 1,3 Configuration PM1,3 Configuration Config Ti Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling Di Shutter No MFC Type MKS GE50A PN Pump CTI IS OB-8F Throttle Valve No RGA No Target PSU AE / Pinnacle / 12kW / Profibus Magnetron MB300DK ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Process Module 2 Configuration PM2 Configuration Config Etch Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling N/A Shutter No MFC Type MKS GE50A PN Pump Turbor pump Throttle Valve No RGA No Target PSU AE LFGS 1250D(MF) / Cesar136 (RF) Magnetron N/A ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Process Module 4,5 Configuration PM4,5 Configuration Config Ni Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling Di Shutter No MFC Type MKS GE50A PN Pump CTI IS OB-8F Throttle Valve No RGA No Target PSU AE / Pinnacle +/ 10kW / Profibus Magnetron MB300DL ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Process Module 6 Configuration PM6 Configuration Config Ni Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling Di Shutter No MFC Type MKS GE50A PN Pump CTI IS OB-8F Throttle Valve No RGA No Target PSU AE / Pinnacle / 12kW / Profibus Magnetron MB300DF ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Support Equipment Key Common Options Heat Exchanger Yes Manufacturer/Model LYTRON/EWA-15DL-CF04CBD0 Cyro Compressors Yes Manufacturer/Model CTI/ IS100 Quantity 2ea Vacuum Pumps Yes Pump Type Dry Manufacturer/Model Kasiyama MU100 Quantity 3eaOEM 型号描述
未提供文件
无文件
类别
PVD / Sputtering
上次验证： 10 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
156313
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVATEC / UNAXIS / OERLIKON / BALZERS
CLUSTERLINE 200
类别
PVD / Sputtering
上次验证： 10 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
156313
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Clusterline 200E - PVD配置
GEM/SECS Interface Yes(SECS) SECS II Interface Yes Standard Network Communication Capability No Machine Electricity Transformer Current 200A Transformer Voltage 460V Main Power 400V Key Common Options Included? Clean Room Manuals Yes Standard Manuals Yes Calibration Standards No Transport module Configuration Front Monitor Yes Rear Monitor Yes TM Robot Broos MagnaTran LEAP Load Lock Vacuum Turbo Pump TU2 Blank TU3 aligner TU6 Cooler Process Module 1,3 Configuration PM1,3 Configuration Config Ti Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling Di Shutter No MFC Type MKS GE50A PN Pump CTI IS OB-8F Throttle Valve No RGA No Target PSU AE / Pinnacle / 12kW / Profibus Magnetron MB300DK ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Process Module 2 Configuration PM2 Configuration Config Etch Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling N/A Shutter No MFC Type MKS GE50A PN Pump Turbor pump Throttle Valve No RGA No Target PSU AE LFGS 1250D(MF) / Cesar136 (RF) Magnetron N/A ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Process Module 4,5 Configuration PM4,5 Configuration Config Ni Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling Di Shutter No MFC Type MKS GE50A PN Pump CTI IS OB-8F Throttle Valve No RGA No Target PSU AE / Pinnacle +/ 10kW / Profibus Magnetron MB300DL ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Process Module 6 Configuration PM6 Configuration Config Ni Chuck Type Moduler Gate valve VAT 2-Posi Lift Motor JVL Motor Cooling Di Shutter No MFC Type MKS GE50A PN Pump CTI IS OB-8F Throttle Valve No RGA No Target PSU AE / Pinnacle / 12kW / Profibus Magnetron MB300DF ION Gauge Inficon BCG450PN HE Leak port Yes Lamp Bakeout Yes Support Equipment Key Common Options Heat Exchanger Yes Manufacturer/Model LYTRON/EWA-15DL-CF04CBD0 Cyro Compressors Yes Manufacturer/Model CTI/ IS100 Quantity 2ea Vacuum Pumps Yes Pump Type Dry Manufacturer/Model Kasiyama MU100 Quantity 3eaOEM 型号描述
未提供文件
无文件