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说明
Single Wafer Processing配置
Process: SWC Tool config is based on original PO, please verify tool details at tool inspection Chamber R1 & Chamber R2 & Chamber L1 & Chamber L2 Mde. 1:49%HF Med. 2: Poly DI Dispenser N2 Dispemser: Bronkhost Mass Flow Contriller Chuck N2 MFC Chuck: Advanced Pin Chuck Medium1 Chemical: HF(49%) Temperature control: B&R controller, Inlineheater Lufran 6KW*2 Circulation pump: :evitronix BPS-3 Filter: Entegris Concentration Monditor: NA Medium2 Chemical: Poly Temperature control: B&R controller, Inlineheater Lufran 6KW Circulation pump: Levitronix BPS-3 Filter: Entegris Concentration Monditor: Horiba CS-100 series Damage/Missing parts list Please inspect tool to reconfirmOEM 型号描述
The DV-34BF is part of the Da Vinci Series, a single-wafer processing technology platform designed for high-volume manufacturing. It addresses new cleaning requirements for polymer removal and backside etch and clean, providing high-throughput and accurate wafer cleaning to maximize device yields. The four-chamber system performs a wide range of back-and frontside processes on 300 mm wafers and is optimized for emerging technologies such as high-k dielectrics, new metal gates, and non-volatile memory devices. It offers optimized process performance, high throughput, minimized footprint, advanced handling, reduced media consumption, flexible chemistry application, higher reliability, resulting in low CoO.文件
无文件
类别
Wet Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
22980
晶圆尺寸：
12"/300mm
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
DV-34BF
类别
Wet Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
22980
晶圆尺寸：
12"/300mm
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Single Wafer Processing配置
Process: SWC Tool config is based on original PO, please verify tool details at tool inspection Chamber R1 & Chamber R2 & Chamber L1 & Chamber L2 Mde. 1:49%HF Med. 2: Poly DI Dispenser N2 Dispemser: Bronkhost Mass Flow Contriller Chuck N2 MFC Chuck: Advanced Pin Chuck Medium1 Chemical: HF(49%) Temperature control: B&R controller, Inlineheater Lufran 6KW*2 Circulation pump: :evitronix BPS-3 Filter: Entegris Concentration Monditor: NA Medium2 Chemical: Poly Temperature control: B&R controller, Inlineheater Lufran 6KW Circulation pump: Levitronix BPS-3 Filter: Entegris Concentration Monditor: Horiba CS-100 series Damage/Missing parts list Please inspect tool to reconfirmOEM 型号描述
The DV-34BF is part of the Da Vinci Series, a single-wafer processing technology platform designed for high-volume manufacturing. It addresses new cleaning requirements for polymer removal and backside etch and clean, providing high-throughput and accurate wafer cleaning to maximize device yields. The four-chamber system performs a wide range of back-and frontside processes on 300 mm wafers and is optimized for emerging technologies such as high-k dielectrics, new metal gates, and non-volatile memory devices. It offers optimized process performance, high throughput, minimized footprint, advanced handling, reduced media consumption, flexible chemistry application, higher reliability, resulting in low CoO.文件
无文件