说明
Asset Description - Cleaning Wafer Software Version - NA CIM - SECS / Gem Process - Cobalt backside clean配置
System Type Description Quantity Status Main System SEZ203 1 OK Others NA 0 OK Factory Interface SMIF 2 OK Options System UPS 1 Handler System Robot 1 OKOEM 型号描述
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.文件
类别
Wet Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137329
晶圆尺寸：
8"/200mm
年份：
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP203
类别
Wet Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137329
晶圆尺寸：
8"/200mm
年份：
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available