说明
Asset Description - SEZ203 Software Version - 12.29.09.2000 CIM - GEM Process - Backside clean配置
System Type Description Quantity Status Main System Main unit 1 OK Handler System Robot 1 OK Options System NA 0 OK Factory Interface SMIF 2 OK Others NA 0 OKOEM 型号描述
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.文件
类别
Wet Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137328
晶圆尺寸：
8"/200mm
年份：
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP203
类别
Wet Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137328
晶圆尺寸：
8"/200mm
年份：
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available