说明
无说明配置
-General Information Cleaning purpose: Back side PolySi removal Equipment classification: Process one by one -Equipment configuration Wafer Type: 26 slots,200mm, Notch Number of cassette sets: 2 cassette SMIF: SMIF-POD (ASYST) -System configuration Wafer robot: Wafer removal and storage from cassette Eco gripper: 2 pairs on the left and right Elevating unit: Lifting and lowering the chuck and dispenser Chuck: Wafer floating by N2 blow Wafer fixing: Fix the wafer with 6 pins Chuck rotation speed: 400～2000rpm Medium dispenser: Arm that supplies chemicals Process pot: The chemical solution is separated and drained with a 4-layer structure Etching position: 1 to 3 from the bottom Rinse and dry position: Top rank CDS(Chemical dispense system): 3 line Chemical configuration Level 1 Unused Level 2 HNO3+DIW （Unused） Level 3 HF+H2O2 Level 4 DIW dispenser nozzle configuration Chemical 3 line DIW 1 line N2 1 line Heat Exchangers configuration Medium DIW Temperature setting range Room temperature～50℃OEM 型号描述
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.文件
无文件
类别
Wet Etch
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
146833
晶圆尺寸：
未知
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP203
类别
Wet Etch
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
146833
晶圆尺寸：
未知
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
-General Information Cleaning purpose: Back side PolySi removal Equipment classification: Process one by one -Equipment configuration Wafer Type: 26 slots,200mm, Notch Number of cassette sets: 2 cassette SMIF: SMIF-POD (ASYST) -System configuration Wafer robot: Wafer removal and storage from cassette Eco gripper: 2 pairs on the left and right Elevating unit: Lifting and lowering the chuck and dispenser Chuck: Wafer floating by N2 blow Wafer fixing: Fix the wafer with 6 pins Chuck rotation speed: 400～2000rpm Medium dispenser: Arm that supplies chemicals Process pot: The chemical solution is separated and drained with a 4-layer structure Etching position: 1 to 3 from the bottom Rinse and dry position: Top rank CDS(Chemical dispense system): 3 line Chemical configuration Level 1 Unused Level 2 HNO3+DIW （Unused） Level 3 HF+H2O2 Level 4 DIW dispenser nozzle configuration Chemical 3 line DIW 1 line N2 1 line Heat Exchangers configuration Medium DIW Temperature setting range Room temperature～50℃OEM 型号描述
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.文件
无文件